Sometimes engineers will use chemicals to clean up of the master on the photoresist or chemical substance, such as hydrogen peroxide, acetonic.
有师会拔取一些化学品去纯不母盘上的平刻胶或化学精神,水,丙酮。
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Where the mask blocks the light, the photoresist is unchanged.
阻挡光线的地方,光刻胶没有变化。
The wafer is then sent through a hard bake to harden the remaining photoresist.
然后将晶圆送去进行硬烘烤,以使剩余的光刻胶变硬。
Then, a liquid called " photoresist" is spun on and baked to harden.
接着,一种名为“光刻胶”的液体被均匀涂抹并烘烤硬化。
Wherever the light from the stencil touches the wafer, the photoresist is weakened.
当板上的光线接触到晶圆时,光刻胶就会被削弱。
In the lit areas, a reaction weakens the photoresist's chemical bonds.
光区域,反应会削弱光刻胶的化学键。
To clean up, we use yet another special chemical that washes away any remaining photoresist.
为了清理,们使用了另一种特殊的化学物质来洗掉所有残留的光刻胶。
Note that the oxide layer under the photoresist is protected.
请注意,光刻胶下方的氧化层受到保护。
And new problems arise: today, PFAS-based photoresists are essential to make ever-smaller features.
新的问题出现了:如今,基于PFAS的光刻胶对于制造越来越小的特征至关重要。
Once again, we wash away remaining photoresist.
们再次洗掉剩余的光刻胶。
Photoresists aren’t very useful by themselves, but are super powerful when used in conjunction with a photomask.
光刻胶本身不是很有用,但与光结合使用时非常强大。
The wafer is doused in another chemical to wash away that weakened photoresist, leaving an image of the mask.
晶圆会被另一种化学物质冲洗, 以清除那层被削弱的光阻剂,留下的图像。
Once more, we apply a photoresist, and use a new photomask to etch little channels.
再一次,们应用光刻胶,并使用新的光来蚀刻小通道。
Next the wafer is sent to a photoresist stripper where the mask layer is removed.
接下来,晶圆被送往光刻胶剥离器,去除层。
The process essentially starts again, first by building up a fresh oxide layer ...which we coat in photoresist.
这个过程基本上又开始了,首先是建立一个新的氧化层… … 们上面涂上光刻胶。
Next, using UV Light and a stencil, a pattern is applied to the photoresist.
接下来,使用紫外线和板将图案应用到光刻胶上。
These tools include the photoresist spin coater, photolithography tool, developer and photoresist stripper.
这些工具包括光刻胶旋涂机、光刻胶工具、显影剂和光刻胶剥离剂。
The wafer then goes to the developer and the weakened photoresist is washed away, leaving only the patterned nanoscopic stencil on the wafer.
然后, 晶圆进入显影剂, 弱化的光刻胶被洗掉,只晶圆上留下图案化的纳米级板。
Next photoresist is spread across the surface and the wafer is sent through a soft bake to remove the solvent.
接下来,将光刻胶涂抹表面,并将晶圆送去软烘烤以去除溶剂。
So, very similar to before, we apply a photoresist, use a photomask, dissolve the exposed resist, and use a chemical to remove any exposed metal.
因此,与之前非常相似, 们应用光刻胶, 使用光, 溶解暴露的抗蚀剂,并使用化学物质去除任何暴露的金属。
To start, a layer of insulating silicon dioxide is deposited on top of the wafer and then a layer of light sensitive photoresist is spread across the top.
首先,晶圆顶部沉积一层绝缘二氧化硅,然后顶部涂上一层感光光刻胶。
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