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Sometimes engineers will use chemicals to clean up of the master on the photoresist or chemical substance, such as hydrogen peroxide, acetonic.

有时工程师会拔取一些去纯不母盘上精神,如双氧水,丙酮。

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Where the mask blocks the light, the photoresist is unchanged.

在掩模阻挡线地方,没有变化。

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The wafer is then sent through a hard bake to harden the remaining photoresist.

然后将晶圆送去进行硬烘烤,以使剩余变硬

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Then, a liquid called " photoresist" is spun on and baked to harden.

接着,一种名为“体被均匀涂抹并烘烤硬化。

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Wherever the light from  the stencil touches the wafer, the photoresist is weakened.

当模板上线接触到晶圆时,就会被削弱。

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In the lit areas, a reaction weakens the photoresist's chemical bonds.

区域,反应会削弱化学键。

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To clean up, we use yet another special chemical that washes away any remaining photoresist.

为了清理,我们使用了另一种特殊化学物质来洗掉所有残留

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Note that the oxide layer under the photoresist is protected.

请注意,下方氧化层受到保护。

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And new problems arise: today, PFAS-based photoresists are essential to make ever-smaller features.

问题出现了:如今,基于PFAS对于制造越来越小特征至关重要。

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Once again, we wash away remaining photoresist.

我们再次洗掉剩余

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Photoresists aren’t very useful by themselves, but are super powerful when used in conjunction with a photomask.

本身不是很有用,但与掩模结合使用时非常强大。

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The wafer is doused in another chemical to wash away that weakened photoresist, leaving an image of the mask.

晶圆会被另一种化学物质冲洗, 以清除那层被削弱阻剂留下掩模图像。

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Once more, we apply a photoresist, and use a new photomask to etch little channels.

再一次,我们应用并使用新掩模来蚀小通道。

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Next the  wafer is sent to a photoresist stripper where the mask layer is removed.

接下来,晶圆被送往剥离器,去除掩模层。

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The process essentially starts again, first by building up a fresh oxide layer ...which we coat in photoresist.

这个过程基本上又开始了,首先是建立一个新氧化层… … 我们在上面涂上

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Next, using UV Light and a stencil, a pattern is applied to the photoresist.

接下来,使用紫外线和模板将图案应用到

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These tools include the  photoresist spin coater, photolithography tool, developer and photoresist stripper.

这些工具包括旋涂机、工具、显影剂和剥离剂。

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The wafer then goes to the developer  and the weakened photoresist is washed away, leaving only the patterned nanoscopic stencil on  the wafer.

然后, 晶圆进入显影剂, 弱化被洗掉,只在晶圆上留下图案化纳米级模板。

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Next photoresist is  spread across the surface and the wafer is sent through a soft bake to remove the solvent.

接下来,将涂抹在表面,并将晶圆送去软烘烤以去除溶剂。

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So, very similar to before, we apply a photoresist, use a photomask, dissolve the exposed resist, and use a chemical to remove any exposed metal.

因此,与之前非常相似, 我们应用 使用掩模, 溶解暴露抗蚀剂,并使用化学物质去除任何暴露金属。

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To start, a layer of insulating silicon dioxide is deposited  on top of the wafer and then a layer of light sensitive photoresist is spread across the top.

首先,在晶圆顶部沉积一层绝缘二氧化硅,然后在顶部涂上一层感

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