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Air in coating color greatly influences the paper quality and coater runnability.

料中的气体将量和的运行性能。

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These tools include the  photoresist spin coater, photolithography tool, developer and photoresist stripper.

这些工具包括涂机工具、显

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First the  photoresist spin coater applies a light-sensitive layer to the surface of the wafer and sends  it through a soft bake where the wafer is heated in order to evaporate the solvent from  the photoresist.

首先,涂机在晶圆表面涂上一层感层,并将其送入软烘烤,在那里加热晶圆以蒸发中的溶

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