Air in coating color greatly influences the paper quality and coater runnability.
料中的气体将量和机的运行性能。
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These tools include the photoresist spin coater, photolithography tool, developer and photoresist stripper.
这些工具包括旋涂机、工具、显离。
First the photoresist spin coater applies a light-sensitive layer to the surface of the wafer and sends it through a soft bake where the wafer is heated in order to evaporate the solvent from the photoresist.
首先,旋涂机在晶圆表面涂上一层感层,并将其送入软烘烤,在那里加热晶圆以蒸发中的溶。
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