The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘
悬臂梁的物理性能参数尤其
弹性系数对MEMS中微器件的性能有
的影响。
The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘悬臂梁的物理性能参数尤其弹性系数对MEMS中微器件的性能有的影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
微机电系统(MEMS)将21世纪最的研究领
,而微能源器件MEMS其中个分支,其发展直接关系到MEMS在某些领中的应用。
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